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■Excimer irradiation system
Excimer lamp, irradiating the unvaried wavelength due to the
filling gas, particularly facilitates the low-temperature
treatment process.
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▼1. Surface cleaning and reforming equipments
Excimer irradiation system offers a good performance of precise
cleaning and reforming using the short-wave ultraviolet lights
with extra-high energy. It also has the properties of instantaneous
lighting and low-temperature treatment of the single light.
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Batch-type excimer equipment
| ●Lamp |
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Excimer lamp x 8 Pieces |
| ●Dimension |
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| ●Uses |
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ƎGA 500mm x 400mm |
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In-line excimer irradiation equipment
| ●Lamp |
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Excimer lamp x 1 Piece |
| ●Dimension |
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| ●Uses |
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Cleaning of the glass substrate terminal |
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Auto-return type excimer equipment
| ●Lamp |
: |
Excimer lamp x 10 Pieces |
| ●Dimension |
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| ●Uses |
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Return type excimer equipment
| ●Lamp |
: |
Excimer lamp x 3 Pieces |
| ●Dimension |
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| ●Uses |
: |
Cleaning of the wafer surface |
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