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■Atmospheric-pressure
plasma irradiation system
Atmospheric-pressure plasma is a process, which is performed
in the ordinary pressure (no need vacuum particularly) and
makes the successive treatments at a low temperature practicable.
We are expecting a high throughput form it due to its ordinary
pressure property and rapid treatment ability. Because almost
no damage is caused by the remote source, a high-efficiently
precise cleaning and reforming process can be performed.
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In-line atmospheric-pressure plasma equipment
| ●Lamp |
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50 mm remote head |
| ●Dimension |
: |
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| ●Uses |
: |
Cleaning of the glass substrate
terminal |
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Direct plasma conveyor equipment
| ●Lamp |
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300 mm remote head |
| ●Dimension |
: |
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| ●Uses |
: |
Cleaning of glass surface |
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Wiping and atmospheric-pressure plasma equipment
| ●Lamp |
: |
50 mm remote head |
| ●Dimension |
: |
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| ●Uses |
: |
Cleaning of the glass substrate
terminal |
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