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Atmospheric-pressure plasma irradiation system

Atmospheric-pressure plasma is a process, which is performed in the ordinary pressure (no need vacuum particularly) and makes the successive treatments at a low temperature practicable. We are expecting a high throughput form it due to its ordinary pressure property and rapid treatment ability. Because almost no damage is caused by the remote source, a high-efficiently precise cleaning and reforming process can be performed.

 
In-line atmospheric-pressure plasma equipment


Lamp : 50 mm remote head
Dimension :  
Uses : Cleaning of the glass substrate terminal

 
Direct plasma conveyor equipment


Lamp : 300 mm remote head
Dimension :  
Uses : Cleaning of glass surface

 
Wiping and atmospheric-pressure plasma equipment


Lamp : 50 mm remote head
Dimension :  
Uses : Cleaning of the glass substrate terminal
 
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